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Ball valve- semiconductor


The vacuum ball valve used for semiconductor vacuum operation, the vacuum chamber...etc. The manufacturing process of the semiconductor industry requires the highest standard of ball valves-used in the production process of laboratories, special gas fields, semiconductor and pharmaceutical industries. The 2-way vacuum ball valve is designed to contain the ball in the central vacuum chamber and open and close by rotating the valve stem 90° (1/4 turn) back and forth. The flow of the three-way ball valve can also be transferred manually or pneumatically through a quarter turn.


  • Body material:
    • CF3M/SS316L sulfur 0.005% ~ 0.017%
  • Ball gasket material:
    • PTFE (the design of the valve pad reduces wear and valve torque)
  • Helium Leak Rate:
    • 2 Way Valve: Less than 1 X 10-7 mbar.l/sec.
  • Optional:
    • pneumatic / manual
  • Multiple connection option:
    • JIS 10K flange
    • KF vacuum flange
    • ISO vacuum flange
    • VCR
  • Size:
    • KF25
    • KF40
    • KF50
    • ISO63
    • ISO80
    • ISO100
  • Surface :
    • Pickled
    • Electro polish to prevent corrosion
    • Mirror polished inside and outside
  • Sealed:
    • PTFE
    • Viton
    • Others…


Short cleaning time


Sanitary connection design with optimized dead angle

sanitary Ball valve Download Now !